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a 16035 vineyard blvd. morgan hill, ca 95037 p 408 225 4314 f 408 225 2079 e www.allsensors.com all sensors all sensors ds-0329 rev b features fps series pressure sensor ? pressure ranges from 0.1 to 2 inh2o (25 to 500 pa) ? pressure sensor based on thermal micro-fow measurement ? calibrated and temperature compensated ? analog output and digital spi interface ? high flow impedance ? very low fow-through leakage ? high immunity to dust and humidity ? no loss in sensitivity using long tubing ? rohs and reach compliant ? air and other non-corrosive gasses media device opera ting pressure pr oof pressure 5 burst pr essure 5 fpss025u 0.1 inh2o 0 - 25 pa 0 - 0.25 mbar 30 psi (2 bar) 30 psi (2 bar) fpss050u 0.2 inh2o 0 - 50 pa 0 - 0.50 mbar 30 psi (2 bar) 30 psi (2 bar) fpss100u 0.4 inh2o 0 - 100 pa 0 - 1.00 mbar 30 psi (2 bar) 30 psi (2 bar) fpss250u 1.0 inh2o 0 - 250 pa 0 - 2.50 mbar 30 psi (2 bar) 30 psi (2 bar) fpss500u 2.0 inh2o 0 - 500 pa 0 - 5.00 mbar 30 psi (2 bar) 30 psi (2 bar) fpss025b 0.1 inh2o 0 - 25 pa 0 - 0.25 mbar 30 psi (2 bar) 30 psi (2 bar) fpss050b 0.2 inh2o 0 - 50 pa 0 - 0.50 mbar 30 psi (2 bar) 30 psi (2 bar) FPSS100B 0.4 inh2o 0 - 100 pa 0 - 1.00 mbar 30 psi (2 bar) 30 psi (2 bar) fpss250b 1.0 inh2o 0 - 250 pa 0 - 2.50 mbar 30 psi (2 bar) 30 psi (2 bar) fpss500b 2.0 inh2o 0 - 500 pa 0 - 5.00 mbar 30 psi (2 bar) 30 psi (2 bar) pressure sensor characteristics page 1 gas type cor rection factor dry air 1.00 oxygen (o 2 ) 1.07 nitrogen (n 2 ) 0.97 argon (ar) 0.98 carbon dioxide (co 2 ) 0.56 gas correction factors 10 (page 7) electrical connection ? hvac ? medical applications pin connection 1, 10 do not connect 2 v s 3 gnd 4, 5 v out 6 sclk 7 mosi 8 miso 9 /cs note: pins 1 and 10 are internally connected.
fps series pressure sensor pressure sensor maximum ratings environmental specifcations su pply voltage (v s ) fps 3v 2.70 to 3.30 vdc fps 5v 4.75 to 5.25 vdc output current 1 ma lead specifcations average preheating temperature gradient 2.5 c/s soak time appr ox. 3 min time above 217 c 50 s time above 230 c 40 s time above 250 c 15 s peak temperature 260c cooling temperature gradient -3.5 c/s te mper ature ranges compensated 0 c to 70c operati ng -20c to 80 c storage -40c to 80 c humidity limits 97% rh (non condensing) vibration 1 20 g mechanical shock 2 500 g specifcation notes note 1: s weep 20 to 2000 h z , 8 min , 4 cycle s per axi s , mil -st d-883, m et hod 2007. note 2: 5 s hocks , 3 axe s , mil -st d-883e , m et hod 2002.4. specifcations page 2 performance characteristics 4 for: fpss025x, fpss050x 5v device (v s = 5.0 v dc , t a = 20 c , p abs = 1 bara, calibrated in air, output signals analog and digital are non-ratiometric to v s ) analog output (unidirectional devices) common characteristics min typ max un its non-linearity 9 - - (1% of reading + 0.5 % fss) - total accuracy 3 5 to 55 c - - (1.5% of reading + 1.5 % fss) - 0 to 70 c - - (3.5% of reading +1.5 %fss) - noise level (rms) - 0.03 - %fss ofset warm-up shift - - less than noise - ofset long term stability 6 - 0.0002 0.0004 inh2o/year current consumption (no load) 8 - 7 8 ma response time (t 63 ) - 5 - ms power-on time - - 25 ms characteristics min typ max units zero pressure ofset 0.49 0.50 0.51 v full scale span 3.97 4.00 4.03 v full scale output - 4.50 - v thermal efects ofset @ 5 to 55 c - - 20 mv ofset @ 0 to 70 c - - 40 mv thermal efects span @ 5 to 55 c - 1.25 2 %fss span @ 0 to 70 c - 1.75 2.75 %fss
a 16035 vineyard blvd. morgan hill, ca 95037 p 408 225 4314 f 408 225 2079 e www.allsensors.com all sensors all sensors ds-0329 rev b performance characteristics 4 (contd) analog output (bidirectional devices) digital output performance characteristics 4 for: fpss100x, fpss250x, fpss500x 5v device (v s = 5.0 v dc , t a = 20 c , p abs = 1 bara, calibrated in air, output signals analog and digital are non-ratiometric to v s ) page 3 characteristics min typ max units zero pressure ofset 2.49 2.50 2.51 v full scale span 3.97 4.00 4.03 v output @ max. specifed pressure - 4.50 - v output @ min. specifed pressure - 0.50 - v thermal efects ofset @ 5 to 55 c - - 15 mv ofset @ 0 to 70 c - - 30 mv thermal efects span @ 5 to 55 c - 1.25 2 %fss span @ 0 to 70 c - 1.75 2.75 %fss characteristics min typ max units scale factor (digital output) 7 0.1 inh2o / 0.1 inh2o - 300 - coun ts/0.001 inh2o 0.2 inh2o / 0.2 inh2o - 150 - coun ts/0.001 inh2o zero pressure ofset tolerance -0.2 - +0.2 %fss full scale span tolerance -0.75 - +0.75 %fss thermal efects ofset @ 5 to 55 c - - 60 coun ts ofset @ 0 to 70 c - - 120 coun ts thermal efects span @ 5 to 55 c - 1 1.75 %fss span @ 0 to 70 c - 1.75 2.75 %fss common characteristics min typ max un its non-linearity 9 - - (1% of reading + 0.5 % fss) - total accuracy 3 @ 5 to 55 c - - (1.5% of reading + 1.5 % fss) - @ 0 to 70 c - - (3.5% of reading +1.5 %fss) - noise level (rms) - 0.03 - %fss ofset warm-up shift - - less than noise - ofset long term stability 6 - - 0.1 %fss/year current consumption (no load) 8 - 7 8 ma response time (t 63 ) - 5 - ms power-on time - - 25 ms
fps series pressure sensor analog output (unidirectional devices) analog output (bidirectional devices) digital output page 4 characteristics min typ max units zero pressure ofset 0.49 0.50 0.51 v full scale span 3.97 4.00 4.03 v full scale output - 4.50 - v thermal efects ofset @ 5 to 55 c - - 10 mv ofset @ 0 to 70 c - - 12 mv thermal efects span @ 5 to 55 c - 1 1.75 %fss span @ 0 to 70 c - 2 2.75 %fss characteristics min typ max units zero pressure ofset 2.49 2.50 2.51 v full scale span 3.97 4.00 4.03 v output @ max. specifed pressure - 4.50 - v output @ min. specifed pressure - 0.50 - v thermal efects ofset @ 5 to 55 c - - 10 mv ofset @ 0 to 70 c - - 12 mv thermal efects span @ 5 to 55 c - 1 1.75 %fss span @ 0 to 70 c - 2 2.75 %fss characteristics min typ max units scale factor (digital output) 7 0.4 inh2o / 0.4 inh2o - 75 - coun ts/0.001 inh2o 1.0 inh2o / 1.0 inh2o - 30 - coun ts/0.001 inh2o 2.0 inh2o / 2.0 inh2o - 15 - coun ts/0.001 inh2o zero pressure ofset tolerance -0.1 - +0.1 %fss full scale span tolerance -0.75 - +0.75 %fss thermal efects ofset @ 5 to 55 c - - 30 coun ts ofset @ 0 to 70 c - - 60 coun ts thermal efects span @ 5 to 55 c - 1 1.75 %fss span @ 0 to 70 c - 2 2.75 %fss performance characteristics 4 (contd)
a 16035 vineyard blvd. morgan hill, ca 95037 p 408 225 4314 f 408 225 2079 e www.allsensors.com all sensors all sensors ds-0329 rev b analog output (bidirectional devices) page 5 performance characteristics 4 for: fpss025x, fpss050x 3v device (v s = 3.0 v dc , t a = 20 c , p abs = 1 bara, calibrated in air, output signals analog and digital are non-ratiometric to v s ) analog output (unidirectional devices) common characteristics min typ max un its non-linearity 9 - - (1% of reading + 0.5 % fss) - total accuracy 3 @ 5 to 55 c - - (1.5% of reading + 1.5 % fss) - @ 0 to 70 c - - (3.5% of reading +1.5 %fss) - noise level (rms) - 0.03 - %fss ofset warm-up shift - - less than noise - ofset long term stability 6 - 0.0002 0.0004 inh2o/year current consumption (no load) 8 - 14 16 ma response time (t 63 ) - 5 - ms power-on time - - 25 ms characteristics min typ max units zero pressure ofset 0.29 0.30 0.31 v full scale span 2.37 2.40 2.43 v full scale output - 2.70 - v thermal efects ofset @ 5 to 55 c - - 20 mv ofset @ 0 to 70 c - - 40 mv thermal efects span @ 5 to 55 c - 1.25 2 %fss span @ 0 to 70 c - 1.75 2.75 %fss characteristics min typ max units zero pressure ofset 1.49 1.50 1.51 v full scale span 2.37 2.40 2.43 v output @ max. specifed pressure - 2.70 - v output @ min. specifed pressure - 0.30 - v thermal efects ofset @ 5 to 55 c - - 15 mv ofset @ 0 to 70 c - - 30 mv thermal efects span @ 5 to 55 c - 1.25 2 %fss span @ 0 to 70 c - 1.75 2.75 %fss
fps series pressure sensor performance characteristics 4 ( contd) page 6 digital output performance characteristics 4 for: fpss100x, fpss250x, fpss500x 3v device (v s = 3.0 v dc , t a = 20 c , p abs = 1 bara, calibrated in air, output signals analog and digital are non-ratiometric to v s ) analog output (unidirectional devices) characteristics min typ max units scale factor (digital output) 7 0.1 inh2o / 0.1 inh2o - 300 - coun ts/0.001 inh2o 0.2 inh2o / 0.2 inh2o - 150 - coun ts/0.001 inh2o zero pressure ofset tolerance -0.2 - +0.2 %fss full scale span tolerance -0.75 - +0.75 %fss thermal efects ofset @ 5 to 55 c - - 60 coun ts ofset @ 0 to 70 c - - 120 coun ts thermal efects span @ 5 to 55 c - 1 1.75 %fss span @ 0 to 70 c - 1.75 2.75 %fss common characteristics min typ max un its non-linearity 9 - - (1% of reading + 0.5 % fss) - total accuracy 3 5 to 55 c - - (1.5% of reading + 1.5 % fss) - 0 to 70 c - - (3.5% of reading +1.5 %fss) - noise level (rms) - 0.03 - %fss ofset warm-up shift - - less than noise - ofset long term stability 6 - - 0.1 %fss/year current consumption (no load) 8 - 14 16 ma response time (t 63 ) - 5 - ms power-on time - - 25 ms characteristics min typ max units zero pressure ofset 0.29 0.30 0.31 v full scale span 2.37 2.40 2.43 v full scale output - 2.70 - v thermal efects ofset @ 5 to 55 c - - 10 mv ofset @ 0 to 70 c - - 12 mv thermal efects span @ 5 to 55 c - 1 1.75 %fss span @ 0 to 70 c - 2 2.75 %fss
a 16035 vineyard blvd. morgan hill, ca 95037 p 408 225 4314 f 408 225 2079 e www.allsensors.com all sensors all sensors ds-0329 rev b performance characteristics 4 (contd) page 7 specifcation notes (contd) note 3: t otal accuracy is the combine d error from offs et and s pan calibration , linearity , pressure h y steresis and temperature effect s . note 4: t he sensor is calibrate d with a common mode pressure of 1 bar abs olute . d ue to the ma ss flow based measuring principle , variation s in abs - olute common mode pressure need to be compen s ated accor ding to the following formula : note 5: t he max . common mode pressure is 30 psi note 6: f igure based on accelerate d lifetime test corre sponding to 1 year of life . n ote 7: t he d igital output signal is a signed , two s complement integer . n egative pressures will res ult in a negative output . n ote 8: p lease contact a ll s ensors c orporation for low power options . n ote 9: n on - linearity refers to a terminal based fsl (f itting s traig ht l ine ) going th rough the actual zero pressure reading . n ote 10: f or example with a fpss500... sensor measuring co 2 gas , at full - s cale output the actual pressure will be 2.00 in h2o x 0.56 = 1.12 in h2o . n ote 11: f or correct operation of fps 3v d evices , the d evice driving the spi bus must h ave a minimum drive capability of 2 ma. gas co rr ect on factor p e ? = p sensor x p e ? = true d i? erent al pressure p sensor = d i? erent al pressure as indicated by output vo ltag e analog output (bidirectional devices) digital output characteristics min typ max units zero pressure ofset 1.49 1.50 1.51 v full scale span 2.37 2.40 2.43 v output @ max. specifed pressure - 2.70 - v output @ min. specifed pressure - 0.30 - v thermal efects ofset @ 5 to 55 c - - 10 mv ofset @ 0 to 70 c - - 12 mv thermal efects span @ 5 to 55 c - 1 1.75 %fss span @ 0 to 70 c - 2 2.75 %fss characteristics min typ max units scale factor (digital output) 7 0.4 inh2o / 0.4 inh2o - 75 - coun ts/0.001 inh2o 1.0 inh2o / 1.0 inh2o - 30 - coun ts/0.001 inh2o 2.0 inh2o / 2.0 inh2o - 15 - coun ts/0.001 inh2o zero pressure ofset tolerance -0.1 - +0.1 %fss full scale span tolerance -0.75 - +0.75 %fss thermal efects ofset @ 5 to 55 c - - 30 coun ts ofset @ 0 to 70 c - - 60 coun ts thermal efects span @ 5 to 55 c - 1 1.75 %fss span @ 0 to 70 c - 2 2.75 %fss p abs p eff = p sensor x 14.5 psia p eff = true differential pressure p sensor = differential pressure as indicated by output voltage p abs = current absolute common mode pressure
fps series pressure sensor spi - serial peripheral interface page 8 introduction the fps serial interface is a high-speed data input and output communication port that is asynchronous to the internal conversion cycle. the serial interface operates in 3-wire spi mode. in this setup, the mosi and miso pins are tied together, forming a bidirec - tional data line to the master microcontroller. the remaining serial interface connections consist of chip select (/cs) and serial clock (sclk). care should be taken to ensure that the sensor is properly connected to the master microcontroller. refer to the manufacturer's datasheet for more infor - mation regarding physical connections. signal control the serial interface is enabled by asserting /cs low. the serial input clock, sclk, is gated internally to begin accepting the input data at mosi, or sending the output data on miso. when /cs rises, the data clocked into mosi is loaded into an internal register. note: if spi communication is not required (i.e. only analog output is being used) pins 6 to 8 must be connected to ground and pin 9 to vs. failure to do so may result in damage to the sensor. note: it is important to adhere to the communication protocol in order to avoid damage to the sensor. data read when powered on, the sensor begins to continuous - ly measure pressure. to initiate data transfer from the sensor, the following three unique bytes must be written sequentially, msb frst, to the mosi pin (see fig. 1): step hexadecimal binary description 1 0x2d b00101101 poll current pressure measurement 2 0x14 b00010100 send result to data register 3 0x98 b10011000 read data register the entire 16 bit content of the fps register is then read out on the miso pin, msb frst, by applying 16 successive clock pulses to sclk with /cs asserted low. note that the value of the fps is held at zero for internal signal processing purposes. this is below the noise threshold of the sensor and thus its fxed value does not affect sensor performance and accuracy. from the digital sensor output the actual pressure value can be calculated as follows: so for a 1.0 inh2o sensor (fpss250b...) with a scale factor of 120 a digital output of 30,000 counts (7530h) calculates to a positive pressure of 1.0 inh2o. similarly, a digital output of -30,000 counts (8ad0h) calculates to a negative pressure of -1.0 inh2o. fig. 1 : data transfer sclk (cpol=0) (cpah=0) mosi miso /cs 0 101 1 10 0 0 101 0 0 0 0 st ep 2 st ep 1 sclk (cpol=0) (cpah=0) mosi miso /cs 1 0 1 1 00 0 data from sen sor st ep 3 0 15 14 13 12 11 10 987654 3210 msb scale factor pressure [inh2o] = dig it al output [ co unts] counts inh2o
a 16035 vineyard blvd. morgan hill, ca 95037 p 408 225 4314 f 408 225 2079 e www.allsensors.com all sensors all sensors ds-0329 rev b serial interface specifcation parameter symbol conditions min. typ . max. units internal oscillator clock frequency f iclk osc(4:0)=00000 3.3 4.15 5.3 mhz external clock frequency f eclk v cksel =0 min. - 0.2 - mhz max. - 5 - mhz external master clock input low time f eclkin lo t eclk =1/f eclk 40 - 60 %t eclk external master clock input high time f eclkin hi t eclk =1/f eclk 40 - 60 %t eclk sclk setup to falling edge /cs t sc - 30 - - ns /cs falling edge to sclk rising edge setup time t css - 30 - - ns /cs idle time t csi f clk = 4 mhz 1.5 - - s sclk falling edge to data valid delay t do c load =15 pf - - 80 ns data valid to sclk rising edge setup time t ds - 30 - - ns data valid to sclk rising edge hold time t dh - 30 - - ns sclk high pulse width t ch - 100 - - ns sclk low pulse width t ci - 100 - - ns /cs rising edge to sclk rising edge hold time t csh - 30 - - ns /cs falling edge to output enable t dv c load =15 pf - - 25 ns /cs rising edge to output disable t tr c load =15 pf - - 25 ns fps (5 v supply) maximum output load capacities c load r load = , - 200 - pf phase margin > 55 input voltage, logic high v ih - 0.8 x v s - - v input voltage, logic low v il - - - 0.2 x v s v output voltage, logic high v oh r load = , vs-0.1 - - v r load = 2 k , vs-0.15 - - v output voltage, logic low v ol r load = , - - 0.5 v r load = 2 k , - - 0.2 v fps (3 v supply) 11 maximum output load capacities c load r load = 1 k , - 15 - pf input voltage, logic high v ih - 0.65 x v s - - v input voltage, logic low v il - - - 0.35 x v s v output voltage, logic high v oh i o = -20 a vs-0.4 - - v output voltage, logic low v ol i o =20 a - - 0.4 v page 9 fig. 2 : timing diagram css t t dv sclk mo si miso /cs t sc t cl ch t t dh t ds do t t tr t csh t csi
fps series pressure sensor package drawings page 10 10 9 8 7 6 1 2 3 4 5 5.0 17.53 0.15 12.70 0.15 17.70 18.03 ? 2.20 6.26 14.97 7.85 8.95 0.5 5.60 0.2 15.65 16.05 3.0 0.25 0.46 2.54 10.16 5.60 3.10 0.2 1.60 0.2 2.50 10.70 high pre ss ure port fa02 package 10 9 8 7 6 1 2 3 4 5 5.0 17.53 0.15 12.70 0.15 17.70 18.03 ? 2.20 6.26 15.22 1.43 5.60 0.2 5.08 3.0 0.25 0.51 1.27 2.54 5.60 3.10 0.2 1.60 0.2 2.50 10.70 high pre ss ure port 13.85 fa01 package
a 16035 vineyard blvd. morgan hill, ca 95037 p 408 225 4314 f 408 225 2079 e www.allsensors.com all sensors all sensors ds-0329 rev b how to order page 11 series pressure range calibration housing output grade fps s025 0.1 inh2o (25 pa) b differential (bidirectional) e fa01 smt, 2 ports same side 3 non-ratiometric, 3 v supply s high s050 0.2 inh2o (50 pa) u gage (unidirectional) f fa02 dip, 2 ports 6 non-ratiometric, 5 v supply s100 0.4 inh2o (100 pa) s250 1 inh2o (250 pa) s500 2 inh2 o (500 pa) example: fps s250 b f 6 s options all sensors reserves the right to make changes to any products herein. all sensors does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others.

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